1992
ACL
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L.Boufendi, A.Plain, J.P.Blondeau, A.Bouchoule, C.Laure, M.Toogood, 'MEASUREMENTS OF PARTICLE-SIZE KINETICS FROM NANOMETER TO MICROMETER SCALE IN A LOW-PRESSURE ARGON-SILANE RADIOFREQUENCY DISCHARGE', Appl. Phys. Lett. 60 169-171 (1992) doi:10.1063/1.106981
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