2013
ACL
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A.Bousquet, F.Zoubian, J.Cellier, T.Sauvage, E.Tomasella, 'Control the Composition of Tantalum Oxynitride Films by Sputtering a Tantalum Target in Ar/O2/N2 Radiofrequency Magnetron Plasmas', Plasma Process. Polym. 10 990-998 (2013) doi:10.1002/ppap.201300036
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