2014
ACL
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A.Bousquet, F.Zoubian, J.Cellier, C.Taviot-Gueho, T.Sauvage, E.Tomasella, 'Structural and ellipsometric study on tailored optical properties of tantalum oxynitride films deposited by reactive sputtering', J. Phys. D-Appl. Phys 47 475201 (2014) doi:10.1088/0022-3727/47/47/475201
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