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2018
ACL
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Sylvain Lemettre, Clément Bessouet, Philippe Coste, Helene Lecoq, Thierry Sauvage, Alain Bosseboeuf, Johan Moulin, 'In-Situ Electrical Characterization of Low Temperature Getter Thin Films Activation', ECS Transactions 86 47-53 (2018) doi:10.1149/08616.0047ecst
Non-evaporable getter materials based on transition metal alloys (Zr, V, Co, Fe, etc…) are reactive materials able to sorb species like O, N, H or C. Integrated as thin films inside MEMS packages under vacuum, they can compete with desorption during bonding and leaks during time. Their thermo-electrical characteristics under varying atmospheres reflect the evolution of the microstructure and is dependent on the sorption properties. In this frame, 4-probes electrical resistivity measurements have been performed on different getter binary alloys under partial vacuum as a function of the temperature to investigate their activation and evolution.
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