1991
ACL
|
A.Bouchoule, A.Plain, L.Boufendi, J.P.Blondeau, C.Laure, 'PARTICLE GENERATION AND BEHAVIOR IN A SILANE-ARGON LOW-PRESSURE DISCHARGE UNDER CONTINUOUS OR PULSED RADIOFREQUENCY EXCITATION', J. Appl. Phys. 70 1991-2000 (1991) doi:10.1063/1.349484
|