Conditions Extrêmes et Matériaux : Haute Température et Irradiation
CEMHTI - UPR3079 CNRS

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2021

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Laura Decosterd, Konstantina Christina Topka, Babacar Diallo, Diane Samelor, Hugues Vergnes, François Senocq, Brigitte Caussat, Constantin Vahlas, Marie-Joëlle Menu, 'An innovative GC-MS, NMR and ESR combined, gas-phase investigation during chemical vapor deposition of silicon oxynitrides films from tris(dimethylsilyl)amine', Phys. Chem. Chem. Phys. 23 10560-10572 (2021) doi:10.1039/d1cp01129d